Volume 12, number 3
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Evaluation Criteria Fingers Hardness Electrode MEMS Comb Converters

Boris Georgievich Konoplev, Igor Evgenievich Lysenko, Olga Aleksandrovna Ezhova

Southern Federal University, Russia, 344006, Rostov-on-Don, Bolshaia Sadovaua st., 105/42

DOI : http://dx.doi.org/10.13005/bbra/1910

ABSTRACT: The assessment criterion of the rigidity of comb electrodes fingers of the microelectromechanical converters is developed. The assessment criterion allows to estimate the maximum electrodes fingers length to decrease approach probability of snap-down  effect. The modeling results have been analyzed. The estimations of the maximum length of  electrodes fingers are obtained. The estimates  depend on length of electrodes fingers overlapping and applied voltage. The dependences of the maximum length of comb electrodes fingers on length of their overlapping and applied voltage are showed. Since all of the electromechanical converters are reversible, i.e. the converters can work as electrostatic actuators, as well as capacitive displacement transducers. The criteria allowed to define these invertibility condition can be obtained from the equilibrium equations of sensitive elements of micromechanical devices. The proposed assessment criterion of the maximum length of combs electrodes fingers can be used to design micromechanical devices.

KEYWORDS: microelectromechanical systems (MEMS); electromechanical converters; model; modeling

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Konoplev B. G, Lysenko I. E, Ezhova O. A. Evaluation Criteria Fingers Hardness Electrode MEMS Comb Converters. Biosci Biotechnol Res Asia 2015;12(3)
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Konoplev B. G, Lysenko I. E, Ezhova O. A. Evaluation Criteria Fingers Hardness Electrode MEMS Comb Converters. Biosci Biotechnol Res Asia 2015;12(3). Available from: https://www.biotech-asia.org/?p=3594>

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